INL - Lyon Institute of Nanotechnology



Bruno MASENELLI, Director.

Ségolène CALLARD, Deputy Director.

Under the aegis of

  • École Centrale de Lyon
  • CNRS
  • INSA Lyon
  • Université Claude Bernard Lyon 1
  • CPE

Fields of research

The INL pursues multidisciplinary research on micro and nanotechnology, with a focus on four major areas:

  • Functional materials: monolithic integration of functional oxides on silicon, heterostructures combining semiconductors and crystalline oxides, III-V nanowires, nanostructuring by electrochemical anodisation, III-V heterostructures for photonics, nanoemitters and nanoprobes, nanocharacterisation, physical studies.
  • Electronics: Single electron devices, Silicon-based nano-devices, functional material-based devices, computing architectures based on emerging technologies, distributed sensor systems, heterogeneous design methods, MEMS, micro- and nano-scale electrical characterisation.
  • Photonics and photovoltaics: Photonic crystals, nanophotonic integration, III-V semiconductor-based MOEMS, silicon solar cells (process, silicon thin-film, nanostructures).
  • Biotechnology and health: Bottom-up nanotechnologies, integrated micro-nano-biosystems, biomedical sensors, smart clothing, lab-on-chip, micro-nano-fluidics.

The laboratory has 245 staff members, including 130 in permanent positions.

Primary experiment facilities

NanoLyon technology platform

  • New facilities since 2012, as part of the CPER I@L-NanoLyon project.
  • 1,200 m², including 600 m² assigned to clean rooms.
  • Government-recognised accessible platform.
  • General technology: repository, lithography, printing, annealing, etc.
  • Specific technological channels: functional oxides, III-V semiconductors, silicon, photonics, photovoltaics, biochips, microfluidics, polymers, etc.

Computing and simulation tools

  • High-performance servers.
  • Commercial or self-developed software.

INL - Lyon Institute of Nanotechnology INL - UMR CNRS 5270

Experiment tools

  • Near field: AFM morphology, electronics, liquids, STM, SNOM.
  • Electrical characterisation: static (I-V), medium frequency (C-V, I-t), high frequency (S-parameters), at low and high temperature (4 K - 600 K).
  • Analytic (SIMS), surfaces (XPS-XPD, STM), structural (TEM, DRX).
  • Optics and Electro-optics (photoluminescence, photoreflectance, electroluminescence).

Fields of application

The fields of application of the research encompasses important economic sectors:

  • Information and communication technology: components and circuits for electronics and photonics
  • Energy and environment: solar cells, microsystems for energy recovery
  • Biotechnology and health: biochips, microlaboratories, sensors


Écully, Villeurbanne.

Member of

1 Laboratory of Excellence (LabEx)

IMUST - Institute for Multiscale Science and Technology