The Institut des Nanotechnologies de Lyon (INL) is a Joint Research Unit (UMR 5270). The INL's mission is to develop multidisciplinary technological research in the field of micro and nanotechnologies. Its specificity is to develop research ranging from the elaboration of materials to systems, via the elementary device. Applications include the digital society, the energy transition, the environment and global health.
- Director : Bruno MASENELLI, director and Ségolène CALLARD, deputy director.
- Supervision :
- Domains of application
- Information & telecommunications
- Energy
- Health & wellness
Research areas
- Functional materials: monolithic integration of functional oxides on Silicon, heterostructures combining semiconductors and crystalline oxides, III-V nanowires, nanostructuring by electrochemical anodization, III-V heterostructures for photonics, nanoemitters and nanoprobes, nanocaracterization, physical studies.
- Electronics: monoelectronics, Silicon nanodevices, devices integrating functional materials, computing architectures based on emerging technologies, distributed sensor systems, heterogeneous design methods, MEMS, electrical characterization at micro and nano scales.
- Photonics and photovoltaics: photonic crystals, nanophotonic integration, MOEMS III-V, photovoltaics on silicon (cell processes, thin films, nanostructures)
- Biotechnologies and healthcare: bottom-up nanotechnologies, integrated micro-nano-biosystems, biomedical sensors, smart clothing, lab-on-a-chip, micro-nano-fluidics.
Main equipment
- NanoLyon platform:
- clean rooms
- Generic technologies: deposition, lithography, etching, annealing, etc.
- Specific technologies: functional oxides, III-V semiconductors,
- Computation and simulation resources
- Experimental resources
- Near field
- Electrical characterization,
- Optics and electro-optics
