INL - Lyon Institute of Nanotechnology



Catherine BRU-CHEVALLIER, Director.

Christian SEASSAL, Site Manager at Ecole Centrale de Lyon and Associate Director.

Academic Establishments

  • École Centrale de Lyon
  • CNRS
  • INSA de Lyon
  • Université Claude Bernard Lyon 1
  • CPE

Research Focus

The INL conducts multidisciplinary research in micro- and nanotechnologies, comprising four main fields of study:

  • Functional Materials: Monolithic integration of functional oxide on silicon, heterostructures combining semiconductors as well as crystalline oxides, III-V Nanowires, nanostructuration by electrochemical anodisation, III-V heterostructures for photonics, nanoemitters and nanoprobes, nano characterisation, physical studies.
  • Electronics: Monoelectronics, Nano devices made out of silicon, Multifunctional material integrating devices, architecture of calculations based on emerging technologies, Distributed sensor distribution, heterogenic design methods, MEMS, Electrical characterisation on micro- and nanoscale.
  • Photonics and Photovoltaics: Photonic crystals, integration of nanophotonic systems, III-V MOEMS, photovoltaics on silicon (Cell operations, thin layers, nanostructures).
  • Biotechnology and Medical Engineering: bottom-up nanotechnologies, integrated-nano biosystems, biomedical sensors, intelligent clothes, Laboratory-on-chip, micro- and nano fluids.

The staff at INL includes a total of 245 people, of which 130 are permanently employed.

Main Experimental Facilities

  • Technological Centre NanoLyon:
    • New infrastructure since 2012 in the framework of the CPER I@L-NanoLyon project.
    • 1200 m², of which 600 m² are cleanrooms.
    • Regional platform, recognised by the ministry.
    • Generic technologies: Deposition of nanomaterials, lithography, engravements, annealing.
    • Specific technological streams: Functional oxides, semiconductors III-V, silicon, photonics, photovoltaics, biochips, microfluids, polymers, etc.
  • Computational tools
    • High-performance servers.
    • Commercial software as well as software developed by INL.
  • Experimental apparatus.
    • Near-field: AFM morphology, electronics, liquids, STM, SNOM.
    • Electrical characterisation: static (I-V), mean frequency(C-V, I-t), high frequency (S-parameters), at low and high temperature (4 - 600 K).
    • Analytic (SIMS), surfaces (XPS-XPD, STM), structural (TEM, DRX).
    • Optics and Electro-optics (photoluminescence, photoreflectance, electroluminescence).

Fields of Application

Fields of application comprise numerous large economic sectors, including: 

  • Communication and Information Technology: components and circuits for Electronics and Photonics.
  • Photovoltaic and thermoelectric solar power, microsystems for the conversion of energy.
  • Biotechnologies and Medical Engineering: Biochips, microlaboratories, sensors.


Écully, Villeurbanne.

Member of

  • 1 "Laboratory of Excellence" (LABEX)
    • IMUST - Institute for Multiscale Sciences and Technologies