Catherine BRU-CHEVALLIER, Director.
Christian SEASSAL, Responsible for the branch Ecole Centrale de Lyon and Assistant Director.
- École Centrale de Lyon
- INSA de Lyon
- Université Claude Bernard Lyon 1
The INL conducts multidisciplinary research in micro- and nanotechnologies, comprising four main fields of study:
- Functional Materials: Monolithic integration of functional oxide on silicon, heterostructures combining semiconductors as well as crystalline oxides, III-V Nanowires, nanostructuration by electrochemical anodisation, III-V heterostructures for photonics, nanoemitters and nanoprobes, nano characterisation, physical studies.
- Electronics: Monoelectronics, Nano devices made out of silicon, Multifunctional material integrating devices, architecture of calculations based on emerging technologies, Distributed sensor distribution, heterogenic design methods, MEMS, Electrical characterisation on micro- and nanoscale.
- Photonics and Photovoltaics: Photonic crystals, integration of nanophotonic systems, III-V MOEMS, photovoltaics on silicon (Cell operations, thin layers, nanostructures).
- Biotechnology and Medical Engineering: bottom-up nanotechnologies, integrated-nano biosystems, biomedical sensors, intelligent clothes, Laboratory-on-chip, micro- and nano fluids.
The staff at INL includes a total of 245 people, of which 130 are permanently employed.
Main Experimental Facilities
- Technological Centre NanoLyon:
- New infrastructure since 2012 in the framework of the CPER I@L-NanoLyon project.
- 1200 m², of which 600 m² are cleanrooms.
- Regional platform, recognised by the ministry.
- Generic technologies: Deposition of nanomaterials, lithography, engravements, annealing.
- Specific technological streams: Functional oxides, semiconductors III-V, silicon, photonics, photovoltaics, biochips, microfluids, polymers, etc.
- Computational tools
- High-performance servers.
- Commercial software as well as software developed by INL.
- Experimental apparatus.
- Near-field: AFM morphology, electronics, liquids, STM, SNOM.
- Electrical characterisation: static (I-V), mean frequency(C-V, I-t), high frequency (S-parameters), at low and high temperature (4 - 600 K).
- Analytic (SIMS), surfaces (XPS-XPD, STM), structural (TEM, DRX).
- Optics and Electro-optics (photoluminescence, photoreflectance, electroluminescence).
Fields of Application
Fields of application comprise numerous large economic sectors, including:
- Communication and Information Technology: components and circuits for Electronics and Photonics.
- Photovoltaic and thermoelectric solar power, microsystems for the conversion of energy.
- Biotechnologies and Medical Engineering: Biochips, microlaboratories, sensors.
- 1 "Laboratory of Excellence" (LABEX)
- IMUST - Institute for Multiscale Sciences and Technologies